| Standard Number |
BS EN 62047-6:2010 |
| Title |
Semiconductor devices. Micro-electromechanical devicesAxial fatigue testing methods of thin film materials |
| Status |
Current |
| Publication Date |
30 April 2010 |
| Cross References |
IEC 62047-2:2006, EN 62047-2:2006, ASTM E 1823-05a, ISO 1099, ASTM E 466-96, ISO 6892, ISO 12107 |