BS ISO 17331:2004+A1:2010

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BS ISO 17331:2004+A1:2010

Standard Number
BS ISO 17331:2004+A1:2010
Title
Surface chemical analysis. Chemical methods for the collection of elements from the surface of silicon-wafer working reference materials and their determination by total-reflection X-ray fluorescence (TXRF) spectroscopy
Status
Current
Publication Date
31 March 2005
Cross References
ISO 5725-2:1994, ISO 14644-1:1999, ISO 14706:2000

More details

More info

Descriptors
Surface chemistry, Chemical analysis and testing, Silicon, Substrates (insulating), Control samples, X-ray fluorescence spectrometry, Spectrophotometry, Spectroscopy, Fluorimetry, Iron, Nickel, Decomposition reactions
Title in French
Analyse chimique des surfaces. Mthodes chimiques pour collecter les lments analyss de tranches de silicium comme matriaux de rfrence pour lanalyse par spectroscopie de fluorescence X en rflexion totale (TXRF)
Title in German
Chemische Analytik an Oberflchen. Chemische Methoden fr die Sammlung von Elementen von der Oberflche von Siliziumscheiben-Arbeits-Referenzmaterialien und deren Bestimmung mit Totalreflexions-Rntgenfluoreszenzanalyse (TXRF)
Pages
28
File Size
839.4 KB
Price
140.00