BS EN 62047-8:2011

Standard Number
BS EN 62047-8:2011
Title
Semiconductor devices. Micro-electromechanical devicesStrip bending test method for tensile property measurement of thin films
Status
Current
Publication Date
30 June 2011
Cross References
IEC 62047-2:2006, IEC 62047-3:2006, EN 62047-2:2006, EN 62047-3:2006

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Descriptors
Semiconductor devices, Electronic equipment and components, Electromechanical devices, Semiconductor technology, Integrated circuits, Thin films, Tensile testing, Bend testing, Strips, Test specimens, Test equipment
Title in French
Dispositifs semiconducteurs. Dispositifs microlectromcaniques. Mthode dessai de la flexion de bandes en vue de la mesure des proprits de traction des couches minces
Title in German
Halbleiterbauelemente. Bauelemente der Mikrosystemtechnik. Streifen-Biege-Prfverfahren zur Messung von Zugbeanspruchungsmerkmalen dnner Schichten
Pages
22
File Size
1.637 MB
Price
100.00