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BS ISO 16413:2013

Standard Number
BS ISO 16413:2013
Title
Evaluation of thickness, density and interface width of thin films by X-ray reflectometry. Instrumental requirements, alignment and positioning, data collection, data analysis and reporting
Status
Current
Publication Date
31 March 2013
Cross References
ISO/IEC Guide 98-3, ISO 25178-2

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Descriptors
X-rays, X-ray analysis, X-ray apparatus, Instruments, Thickness measurement, Density measurement
Title in French
valuation de l’paisseur, de la densit et de la largeur de l’interface des films fins par rflectromtrie de rayons X. Exigences instrumentales, alignement et positionnement, rassemblement des donnes, analyse des donnes et rapport
Pages
42
File Size
2.083 MB
Price
162.00

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